diff --git a/flang/lib/Evaluate/CMakeLists.txt b/flang/lib/Evaluate/CMakeLists.txt
index 7eb8ff934af4..24a1c9004bc3 100644
--- a/flang/lib/Evaluate/CMakeLists.txt
+++ b/flang/lib/Evaluate/CMakeLists.txt
@@ -73,3 +73,17 @@ add_flang_library(FortranEvaluate
   acc_gen
   omp_gen
 )
+
+target_precompile_headers(FortranEvaluate PRIVATE
+  [["flang/Evaluate/common.h"]]
+  [["flang/Evaluate/call.h"]]
+  [["flang/Evaluate/traverse.h"]]
+  [["flang/Evaluate/shape.h"]]
+  [["flang/Evaluate/characteristics.h"]]
+  [["flang/Evaluate/variable.h"]]
+  [["flang/Evaluate/real.h"]]
+  [["flang/Evaluate/type.h"]]
+  [["flang/Evaluate/integer.h"]]
+  [["flang/Evaluate/expression.h"]]
+  [["flang/Evaluate/tools.h"]]
+)
diff --git a/flang/lib/Frontend/CMakeLists.txt b/flang/lib/Frontend/CMakeLists.txt
index 00befcb4785b..96ba27ad418f 100644
--- a/flang/lib/Frontend/CMakeLists.txt
+++ b/flang/lib/Frontend/CMakeLists.txt
@@ -74,3 +74,11 @@ add_flang_library(flangFrontend
   clangBasic
   clangDriver
 )
+
+target_precompile_headers(flangFrontend PRIVATE
+  [["flang/Parser/parsing.h"]]
+  [["flang/Parser/parse-tree.h"]]
+  [["flang/Parser/dump-parse-tree.h"]]
+  [["flang/Lower/PFTBuilder.h"]]
+  [["flang/Lower/Bridge.h"]]
+)
diff --git a/flang/lib/Lower/CMakeLists.txt b/flang/lib/Lower/CMakeLists.txt
index 0bd9a47cd040..bc817ff8f1f3 100644
--- a/flang/lib/Lower/CMakeLists.txt
+++ b/flang/lib/Lower/CMakeLists.txt
@@ -73,3 +73,14 @@ add_flang_library(FortranLower
   MLIRLLVMDialect
   MLIRSCFToControlFlow
 )
+
+target_precompile_headers(FortranLower PRIVATE
+  [["flang/Lower/ConvertExpr.h"]]
+  [["flang/Lower/SymbolMap.h"]]
+  [["flang/Lower/AbstractConverter.h"]]
+  [["flang/Lower/IterationSpace.h"]]
+  [["flang/Lower/CallInterface.h"]]
+  [["flang/Lower/BoxAnalyzer.h"]]
+  [["flang/Lower/PFTBuilder.h"]]
+  [["flang/Lower/DirectivesCommon.h"]]
+)
diff --git a/flang/lib/Parser/CMakeLists.txt b/flang/lib/Parser/CMakeLists.txt
index 76fe3d7ce6ba..1855b8a841ba 100644
--- a/flang/lib/Parser/CMakeLists.txt
+++ b/flang/lib/Parser/CMakeLists.txt
@@ -36,3 +36,11 @@ add_flang_library(FortranParser
   omp_gen
   acc_gen
 )
+
+target_precompile_headers(FortranParser PRIVATE
+  [["flang/Parser/parsing.h"]]
+  [["flang/Parser/parse-tree.h"]]
+  [["flang/Parser/provenance.h"]]
+  [["flang/Parser/message.h"]]
+  [["flang/Parser/parse-tree-visitor.h"]]
+)
diff --git a/flang/lib/Semantics/CMakeLists.txt b/flang/lib/Semantics/CMakeLists.txt
index 93bf0c7c5fac..bd8cc47365f0 100644
--- a/flang/lib/Semantics/CMakeLists.txt
+++ b/flang/lib/Semantics/CMakeLists.txt
@@ -64,3 +64,12 @@ add_flang_library(FortranSemantics
   FrontendOpenACC
   TargetParser
 )
+
+target_precompile_headers(FortranSemantics PRIVATE
+  [["flang/Semantics/semantics.h"]]
+  [["flang/Semantics/type.h"]]
+  [["flang/Semantics/openmp-modifiers.h"]]
+  [["flang/Semantics/expression.h"]]
+  [["flang/Semantics/tools.h"]]
+  [["flang/Semantics/symbol.h"]]
+)
diff --git a/llvm/CMakeLists.txt b/llvm/CMakeLists.txt
index fb5e282ce24d..dd9040400530 100644
--- a/llvm/CMakeLists.txt
+++ b/llvm/CMakeLists.txt
@@ -306,6 +306,13 @@ if(LLVM_CCACHE_BUILD)
       endif()
       set_property(GLOBAL PROPERTY RULE_LAUNCH_COMPILE ${CCACHE_PROGRAM})
     else()
+      # Until a way to reliably configure ccache on Windows is found,
+      # disable precompiled headers for Windows + ccache builds
+      if(NOT CMAKE_DISABLE_PRECOMPILE_HEADERS)
+        message(WARNING "Using ccache with precompiled headers on Windows is currently not supported.
+          CMAKE_DISABLE_PRECOMPILE_HEADERS will be set to ON.")
+        set(CMAKE_DISABLE_PRECOMPILE_HEADERS "ON")
+      endif()
       if(LLVM_CCACHE_MAXSIZE OR LLVM_CCACHE_DIR OR
          NOT LLVM_CCACHE_PARAMS MATCHES "CCACHE_CPP2=yes CCACHE_HASHDIR=yes CCACHE_SLOPPINESS=pch_defines,time_macros")
         message(FATAL_ERROR "Ccache configuration through CMake is not supported on Windows. Please use environment variables.")